Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6774019 | Incorporation of an impurity into a thin film | Timothy S. Hayes, Michael Lunn, Paul Nisson, Dean W. Siegel, Michael C. Triplett | 2004-08-10 |
| 6508997 | Silane oxidation exhaust trap | Michael Lunn | 2003-01-21 |
| 6224834 | Silane oxidation exhaust trap | Michael Lunn | 2001-05-01 |
| 6102989 | High conductance trap | — | 2000-08-15 |