Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969691 | Extreme ultraviolet exposure apparatus and method, and method of manufacturing semiconductor device by using the exposure method | Seung Yoon Lee, Doo-gyu Lee | 2021-04-06 |
| 10809624 | Extreme ultraviolet exposure apparatus and method, and method of manufacturing semiconductor device by using the exposure method | Seung Yoon Lee, Doo-gyu Lee | 2020-10-20 |
| 10451983 | Exposure apparatus and method of fabricating semiconductor device using the same | — | 2019-10-22 |
| 9034742 | Method for fabricating semiconductor device | Suk-Hun Choi | 2015-05-19 |