Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969691 | Extreme ultraviolet exposure apparatus and method, and method of manufacturing semiconductor device by using the exposure method | Seung Yoon Lee, Chan-sam Chang | 2021-04-06 |
| 10809624 | Extreme ultraviolet exposure apparatus and method, and method of manufacturing semiconductor device by using the exposure method | Seung Yoon Lee, Chan-sam Chang | 2020-10-20 |