BH

Byeol Han

SC Semes Co.: 1 patents #467 of 991Top 50%
Overall (All Time): #2,786,210 of 4,157,543Top 70%
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Patent #TitleCo-InventorsDate
10622226 Method and apparatus for cleaning component of substrate processing apparatus Soon Cheon Cho, Bongkyu Shin, Hyun-Joong Kim 2020-04-14