Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622226 | Method and apparatus for cleaning component of substrate processing apparatus | Soon Cheon Cho, Bongkyu Shin, Hyun-Joong Kim | 2020-04-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622226 | Method and apparatus for cleaning component of substrate processing apparatus | Soon Cheon Cho, Bongkyu Shin, Hyun-Joong Kim | 2020-04-14 |