Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7846292 | Gas injector and apparatus including the same | Geun Jo Han, Jeong Beom Lee | 2010-12-07 |
| 7156950 | Gas diffusion plate for use in ICP etcher | Hong-Seub Kim | 2007-01-02 |
| 6917508 | Apparatus for manufacturing semiconductor device | Joung-Sik Kim | 2005-07-12 |
| 6847516 | Electrostatic chuck for preventing an arc | Gi-Chung Kwon, Hong-Sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han +1 more | 2005-01-25 |
| 6770836 | Impedance matching circuit for inductively coupled plasma source | Gi-Chung Kwon, Hong-Sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han +1 more | 2004-08-03 |
| 6653988 | Parallel resonance whirl antenna | Gi-Chung Kwon, Hong-Sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han +1 more | 2003-11-25 |