| 8528738 |
Reusable resilient cushion for wafer container |
— |
2013-09-10 |
| 8141712 |
Thin wafer insert |
Michael D. Peterson, Tony Simpson |
2012-03-27 |
| RE42402 |
300 mm microenvironment pod with door on side |
Barry Gregerson, Gary M. Gallagher |
2011-05-31 |
| RE41231 |
300 mm microenvironment pod with door on side |
Barry Gregerson, Gary M. Gallagher |
2010-04-20 |
| 7607543 |
Reticle pod with isolation system |
Barry Gregerson, David L. Halbmaier, Stephen Sumner, Anthony Mathius Tieben, Justin Strike |
2009-10-27 |
| 7528936 |
Substrate container with pressure equalization |
Barry Gregerson, David L. Halbmaier, Stephen Sumner, Anthony Mathius Tieben, Justin Strike |
2009-05-05 |
| 7219802 |
Thin wafer insert |
Michael D. Peterson, Tony Simpson |
2007-05-22 |
| 7139066 |
Reticle carrier including reticle positioning and location means |
Justin Strike |
2006-11-21 |
| 6923325 |
Horizontal cassette |
Joy Duban-Hu, James Nigg |
2005-08-02 |
| 6825916 |
Reticle carrier with positioning cover |
Justin Strike |
2004-11-30 |
| 6758339 |
Thin wafer carrier |
Anthony Simpson |
2004-07-06 |
| RE38221 |
300 mm microenvironment pod with door on side |
Barry Gregerson, Gary M. Gallagher |
2003-08-19 |
| 6010009 |
Shipping and transport cassette with kinematic coupling |
Kelly Peterson, Gary M. Gallagher, Barry Gregerson |
2000-01-04 |
| 5957292 |
Wafer enclosure with door |
Kirk Mikkelsen, Michael S. Adams, Greg Bores |
1999-09-28 |
| 5944194 |
300 mm microenvironment pod with door on side |
Barry Gregerson, Gary M. Gallagher |
1999-08-31 |
| D383898 |
Combination shipping and transport cassette |
Kelly Peterson, Gary M. Gallagher, Barry Gregerson |
1997-09-23 |
| D378873 |
300 mm microenvironment pod with door on side |
Barry Gregerson, Gary M. Gallagher |
1997-04-22 |
| D368802 |
150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment |
Gary M. Gallagher, Boyd C. Wittman |
1996-04-16 |