Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7077722 | Systems and methods for actuating end effectors to condition polishing pads used for polishing microfeature workpieces | Gunnar A. Barnhart, Michael E. Meadows, Charles Dringle | 2006-07-18 |
| 6764378 | Point-of-use fluid regulating system for use in the chemical-mechanical planarization of semiconductor wafers | — | 2004-07-20 |
| 6656015 | Point-of-use fluid regulating system for use in the chemical-mechanical planarization of semiconductor wafers | — | 2003-12-02 |
| 6431950 | Point-of-use fluid regulating system for use in the chemical-mechanical planarization of semiconductor wafers | — | 2002-08-13 |