Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7825424 | Methods to manufacture contaminant-gettering materials in the surface of EUV optics | Robert L. Bristol | 2010-11-02 |
| 7332416 | Methods to manufacture contaminant-gettering materials in the surface of EUV optics | Robert L. Bristol | 2008-02-19 |
| 6402883 | Polishing pad conditioning surface having integral conditioning points | — | 2002-06-11 |
| 6027659 | Polishing pad conditioning surface having integral conditioning points | — | 2000-02-22 |