Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10981184 | Coating apparatus and coating method | Soon Cheon Cho, Hyun-Joong Kim | 2021-04-20 |
| 10622226 | Method and apparatus for cleaning component of substrate processing apparatus | Soon Cheon Cho, Byeol Han, Hyun-Joong Kim | 2020-04-14 |