Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770297 | Method to form ultrashallow junctions using atomic layer deposition and annealing | Yunsang Kim, Edmund Burte | 2020-09-08 |
| 10522354 | Antimony co-doping with phosphorus to form ultrashallow junctions using atomic layer deposition and annealing | Yunsang Kim, Edmund Burte | 2019-12-31 |