| 4688069 |
Isolation for high density integrated circuits |
Richard C. Joy, John L. Mauer, IV |
1987-08-18 |
| 4508757 |
Method of manufacturing a minimum bird's beak recessed oxide isolation structure |
Karen A. Fabricius |
1985-04-02 |
| 4454646 |
Isolation for high density integrated circuits |
Richard C. Joy, John L. Mauer, IV |
1984-06-19 |
| 4454647 |
Isolation for high density integrated circuits |
Richard C. Joy, John L. Mauer, IV |
1984-06-19 |
| 4437897 |
Fabrication process for a shallow emitter/base transistor using same polycrystalline layer |
— |
1984-03-20 |
| 4431460 |
Method of producing shallow, narrow base bipolar transistor structures via dual implantations of selected polycrystalline layer |
Fred Barson |
1984-02-14 |
| 4385975 |
Method of forming wide, deep dielectric filled isolation trenches in the surface of a silicon semiconductor substrate |
Shao-fu Sanford Chu, Allen P. Ho, Cheng T. Horng |
1983-05-31 |
| 4254161 |
Prevention of low pressure chemical vapor deposition silicon dioxide undercutting and flaking |
— |
1981-03-03 |
| 4239811 |
Low pressure chemical vapor deposition of silicon dioxide with oxygen enhancement of the chlorosilane-nitrous oxide reaction |
— |
1980-12-16 |
