Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4547261 | Anisotropic etching of aluminum | Jer-Shen Maa | 1985-10-15 |
| 4375385 | Plasma etching of aluminum | — | 1983-03-01 |
| 4372807 | Plasma etching of aluminum | John L. Vossen, Jr. | 1983-02-08 |
| 4370195 | Removal of plasma etching residues | John L. Vossen, Jr. | 1983-01-25 |
| 4370196 | Anisotropic etching of aluminum | John L. Vossen, Jr. | 1983-01-25 |
| 4214018 | Method for making adherent pinhole free aluminum films on pyroelectric and/or piezoelectric substrates | Dorothy M. Hoffman | 1980-07-22 |