Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683558 | Anode structure for magnetron sputtering systems | Peter A. Sieck, Russell J. Hill, Stephen C. Schulz | 1997-11-04 |
| 5487821 | Anode structure for magnetron sputtering systems | Peter A. Sieck, Russell J. Hill, Stephen C. Schulz | 1996-01-30 |
| 4450787 | Glow discharge plasma deposition of thin films | Herbert A. Weakliem | 1984-05-29 |
| 4399194 | Transparent conductive film | Joseph Zelez | 1983-08-16 |
| 4395467 | Transparent conductive film having areas of high and low resistivity | Joseph Zelez | 1983-07-26 |
| 4372806 | Plasma etching technique | — | 1983-02-08 |
| 4372807 | Plasma etching of aluminum | Bernard Halon | 1983-02-08 |
| 4370196 | Anisotropic etching of aluminum | Bernard Halon | 1983-01-25 |
| 4370195 | Removal of plasma etching residues | Bernard Halon | 1983-01-25 |