| 5936253 |
Position detector and microlithography apparatus comprising same |
— |
1999-08-10 |
| 5859707 |
Position detection apparatus and aligner comprising same |
Masahiro Nakagawa, Masashi Tanaka, Koichiro Komatsu |
1999-01-12 |
| 5783833 |
Method and apparatus for alignment with a substrate, using coma imparting optics |
Masahiro Nakagawa |
1998-07-21 |
| 5754299 |
Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus |
Masahiro Nakagawa, Tadashi Nagayama |
1998-05-19 |
| 5684569 |
Position detecting apparatus and projection exposure apparatus |
Masahiro Nakagawa |
1997-11-04 |
| 5680200 |
Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus |
Masahiro Nakagawa, Tadashi Nagayama |
1997-10-21 |