| 12094968 |
Semiconductor device and method for manufacturing same |
Hiroaki Katou, Saya Shimomura, Shotaro BABA, Hiroshi Yoshida, Yasuhiro Kawai |
2024-09-17 |
| 11715793 |
Semiconductor device and method of manufacturing same |
Hiroaki Katou, Tatsuya Shiraishi, Tatsuya Nishiwaki, Kenya Kobayashi |
2023-08-01 |
| 11640991 |
Semiconductor device and method for manufacturing the same |
Hiroaki Katou, Yasuhiro Kawai, Toshifumi Nishiguchi |
2023-05-02 |
| 11127854 |
Semiconductor device and method of manufacturing same |
Hiroaki Katou, Tatsuya Shiraishi, Tatsuya Nishiwaki, Kenya Kobayashi |
2021-09-21 |
| 10267991 |
Semiconductor device and manufacturing method thereof |
— |
2019-04-23 |
| 10078182 |
Semiconductor device and method for manufacturing the same |
Shinichi Watanuki, Akira Mitsuiki, Tohru Mogami, Tsuyoshi Horikawa, Keizo Kinoshita |
2018-09-18 |
| 10038114 |
Semiconductor device and manufacturing method thereof |
Shinichi Watanuki |
2018-07-31 |
| 9910219 |
Semiconductor device and manufacturing method thereof |
— |
2018-03-06 |
| 9696489 |
Semiconductor device and manufacturing method thereof |
Shinichi Watanuki |
2017-07-04 |
| 9634009 |
System and method for source-drain extension in FinFETs |
Sivananda K. Kanakasabapathy |
2017-04-25 |
| 8492227 |
Method of forming side wall spacers for a semiconductor device |
Akira Mitsuiki |
2013-07-23 |
| 8123901 |
Etching apparatus |
Kazuhiko Ueno |
2012-02-28 |
