Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6277194 | Method for in-situ cleaning of surfaces in a substrate processing chamber | Paul B. Comita, Ann Waldhauer | 2001-08-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6277194 | Method for in-situ cleaning of surfaces in a substrate processing chamber | Paul B. Comita, Ann Waldhauer | 2001-08-21 |