Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400905 | Method of electrostatic chuck motion control for wafer breakage prevention | Junguo LI, Yosuke Tsumita, Andrew Eunbeom Choi | 2025-08-26 |
| 8097091 | Hot source cleaning system | Abbas Rastegar, Dave Krick, Pat Marmillion | 2012-01-17 |