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Gallium arsenide substrate comprising a surface oxide layer with improved surface homogeneity |
Wolfram Fliegel, Christoph Klement, Christa Willnauer, Max Scheffer-Czygan, Stefan Eichler +2 more |
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| 11170989 |
Gallium arsenide substrate comprising a surface oxide layer with improved surface homogeneity |
Wolfram Fliegel, Christoph Klement, Christa Willnauer, Max Scheffer-Czygan, Stefan Eichler +2 more |
2021-11-09 |
| 10460924 |
Process for producing a gallium arsenide substrate which includes marangoni drying |
Wolfram Fliegel, Christoph Klement, Christa Willnauer, Max Scheffer-Czygan, Stefan Eichler +2 more |
2019-10-29 |
| 7195542 |
Process, apparatus and slurry for wire sawing |
Ralf Hammer, Sylvia Müller, Ralf Gruszynsky |
2007-03-27 |
| 7137865 |
Method and device for cutting single crystals, in addition to an adjusting device and a test method for determining a crystal orientation |
Ralf Hammer, Tilo Flade, Cornelia Kumann, Ralf Gruszynsky |
2006-11-21 |
| 6923171 |
Device and method for determining the orientation of a crystallographic plane in relation to a crystal surface and device for cutting a single crystal in a cutting machine |
Ralf Hammer, Ralf Gruszynsky, Tilo Flade |
2005-08-02 |