AB

Anatoly Burov

KL Kla: 2 patents #202 of 758Top 30%
Overall (All Time): #1,734,996 of 4,157,543Top 45%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12406197 Prediction and metrology of stochastic photoresist thickness defects Guy Parsey, Kunlun Bai, Pradeep Vukkadala, Cao Zhang, John S. Graves +2 more 2025-09-02
11966156 Lithography mask repair by simulation of photoresist thickness evolution Pradeep Vukkadala, Guy Parsey, Kunlun Bai, Xiaohan Li, Cao Zhang +2 more 2024-04-23