Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10217607 | Ion implantation apparatus and ion implantation method | Kazuhisa Ishibashi, Shiro Ninomiya, Toshio Yumiyama | 2019-02-26 |
| 9984856 | Ion implantation apparatus | Shiro Ninomiya, Yasuharu Okamoto, Yusuke Ueno | 2018-05-29 |
| 9905397 | Ion implantation apparatus and scanning waveform preparation method | Shiro Ninomiya | 2018-02-27 |
| 9646837 | Ion implantation method and ion implantation apparatus | Shiro Ninomiya, Yasuharu Okamoto, Masaki Ishikawa, Takeshi Kurose | 2017-05-09 |
| 9305784 | Ion implantation method and ion implantation apparatus | Shiro Ninomiya, Yasuharu Okamoto, Toshio Yumiyama | 2016-04-05 |
| 9165772 | Ion implantation method and ion implantation apparatus | Shiro Ninomiya, Tetsuya Kudo | 2015-10-20 |
| 8980654 | Ion implantation method and ion implantation apparatus | Shiro Ninomiya | 2015-03-17 |
| 8772142 | Ion implantation method and ion implantation apparatus | Shiro Ninomiya, Tetsuya Kudo | 2014-07-08 |
| 8772741 | Ion implantation method and ion implantation apparatus | Shiro Ninomiya, Yasuhiko Kimura, Yasuharu Okamoto, Toshio Yumiyama | 2014-07-08 |
| 8735855 | Ion beam irradiation system and ion beam irradiation method | Shiro Ninomiya, Toshio Yumiyama, Yasuhiko Kimura, Tetsuya Kudo | 2014-05-27 |