| 6603542 |
High sensitivity optical inspection system and method for detecting flaws on a diffractive surface |
Eric Chase, Jay Ormsby, Sergey V. Broude, Lloyd Quackenbos |
2003-08-05 |
| 5814829 |
Multistation surface inspection system |
Sergey V. Broude, Nicholas Allen, Eric Chase, Carl Johnson, Pascal Miller +1 more |
1998-09-29 |
| 5717198 |
Pellicle reflectivity monitoring system having means for compensating for portions of light reflected by the pellicle |
Sergey V. Broude, Nicholas Allen, Eric Chase, Carl Johnson, Pascal Miller +1 more |
1998-02-10 |
| 5675409 |
Plate holder for a surface inspection system |
Sergey V. Broude, David C. Giroux, Eric Chase, Carl Johnson, Pascal Miller +2 more |
1997-10-07 |
| 5625193 |
Optical inspection system and method for detecting flaws on a diffractive surface |
Sergey V. Broude, Nicholas Allen, Eric Chase, Carl Johnson, Pascal Miller +1 more |
1997-04-29 |
| 5602401 |
Data processing system and method for a surface inspection apparatus |
Sergey V. Broude, Nicholas Allen, Eric Chase, Carl Johnson, Pascal Miller +1 more |
1997-02-11 |