Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5084402 | Method of fabricating a semiconductor substrate, and semiconductor device, having thick oxide films and groove isolation | Akihisa Uchida, Toshihiko Takakura, Katsumi Ogiue, Yoichi Tamaki, Masao Kawamura | 1992-01-28 |