Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7481312 | Direct cooling pallet assembly for temperature stability for deep ion mill etch process | Pei C. Chen, Jorge Goitia, Cherngye Hwang, Diana Perez, Yongjian Sun | 2009-01-27 |
| 7296420 | Direct cooling pallet tray for temperature stability for deep ion mill etch process | Pei C. Chen, Jorge Goitia, Cherngye Hwang, Diana Perez, Yongjian Sun | 2007-11-20 |