Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7104129 | Vertically integrated MEMS structure with electronics in a hermetically sealed cavity | Steven S. Nasiri | 2006-09-12 |
| 6939473 | Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging | Steven S. Nasiri | 2005-09-06 |
| 6517736 | Thin film gasket process | Nicholas J. Mourlas | 2003-02-11 |
| 5610455 | Electret containing syndiotactic vinyl aromatic polymer | Richard C. Allen, Charles R. Kleissler, David B. Redmond | 1997-03-11 |