Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6236021 | Substrate transport assembly for rapid thermal processing system | Fritz B. Harris | 2001-05-22 |
| 6204483 | Heating assembly for rapid thermal processing system | Fritz B. Harris | 2001-03-20 |