Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5164330 | Etchback process for tungsten utilizing a NF3/AR chemistry | Rickie L. Davis, Sridhar Balakrishnan | 1992-11-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5164330 | Etchback process for tungsten utilizing a NF3/AR chemistry | Rickie L. Davis, Sridhar Balakrishnan | 1992-11-17 |