Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6514879 | Method and apparatus for dry/catalytic-wet steam oxidation of silicon | Reza Arghavani, Robert S. Chau | 2003-02-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6514879 | Method and apparatus for dry/catalytic-wet steam oxidation of silicon | Reza Arghavani, Robert S. Chau | 2003-02-04 |