Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7531102 | Simultaneous selective polymer deposition and etch pitch doubling for sub 50nm line/space patterning | Qiquan Geng, Jeff J. Xu, Everett Lee, Michael Tzu Ru, Chung-Yuen Hui | 2009-05-12 |