Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7942379 | Active vibration isolation system with a combined position actuator | — | 2011-05-17 |
| 7859259 | Magnetic filed compensation system with increased bandwidth | — | 2010-12-28 |
| 7822509 | Control system for active vibration isolation of a supported payload | — | 2010-10-26 |
| 7715948 | Method and apparatus for regulating vibration isolation systems | — | 2010-05-11 |
| 7525314 | Method and device for active compensation of magnetic and electromagnetic disturbance fields | — | 2009-04-28 |
| 7489987 | Control of an active vibration isolation system | Peter A. Kropp | 2009-02-10 |
| 7290642 | Magnetic spring device with negative stiffness | — | 2007-11-06 |
| 7269995 | Method and apparatus of vibration isolation, in particular for electron beam metrology tools | — | 2007-09-18 |
| 7234913 | Fast swapping station for wafer transport | Ralf Tillmann | 2007-06-26 |
| 7075772 | Electrostatic gripping device | — | 2006-07-11 |
| 6884992 | Imaging and/or raster-mode scanning system provided with a device for compensating the image degradations resulting from environmental factors | — | 2005-04-26 |
| 6816800 | Method of recording a vibration isolation system | — | 2004-11-09 |
| 6758312 | Apparatus and method for vibration-isolating bearing of loads | — | 2004-07-06 |
| 6308557 | Device scanning in a raster mode, with compensation of disturbing effects of mechanical vibrations on the scanning process | — | 2001-10-30 |
| 6226075 | Supporting device provided with a gas spring with a gas bearing, and lithographic device provided with such supporting devices | Erik Loopstra | 2001-05-01 |