Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9107335 | Method for manufacturing an integrated circuit and an integrated circuit | Mirko Vogt, Stefan Tegen | 2015-08-11 |
| 9047985 | Apparatus, storage device, switch and methods, which include microstructures extending from a support | Stefan Tegen | 2015-06-02 |
| 8987090 | Method of manufacturing a semiconductor device with device separation structures | Rolf Weis, Stefan Tegen | 2015-03-24 |
| 8980714 | Semiconductor device with buried gate electrode structures | Rolf Weis, Stefan Tegen | 2015-03-17 |