Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7760341 | Systems and methods for in-situ reflectivity degradation monitoring of optical collectors used in extreme ultraviolet (EUV) lithography processes | Stefan Wurm | 2010-07-20 |
| 7709816 | Systems and methods for monitoring and controlling the operation of extreme ultraviolet (EUV) light sources used in semiconductor fabrication | Stefan Wurm, Kevin Kemp | 2010-05-04 |
| 7250620 | EUV lithography filter | Stefan Wurm | 2007-07-31 |