Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7799691 | System and method for anisotropically etching a recess in a silicon substrate | Thorsten Hanewald, Andreas Hauser, Ingold Janssen | 2010-09-21 |
| 7763520 | Capacitor device with a layer structure disposed in a meander-shaped manner | Carsten Ahrens, Raimund Foerg, Klaus-Peter Koller | 2010-07-27 |