Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7799691 | System and method for anisotropically etching a recess in a silicon substrate | Thorsten Hanewald, Andreas Hauser, Kai-Olaf Subke | 2010-09-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7799691 | System and method for anisotropically etching a recess in a silicon substrate | Thorsten Hanewald, Andreas Hauser, Kai-Olaf Subke | 2010-09-21 |