Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837120 | Method of manufacturing CZ silicon wafers, and method of manufacturing a semiconductor device | Thomas Wuebben, Helmut Oefner, Hans-Joachim Schulze | 2020-11-17 |
| 10724149 | Method of manufacturing CZ silicon wafers, and method of manufacturing a semiconductor device | Thomas Wuebben, Helmut Oefner, Hans-Joachim Schulze | 2020-07-28 |
| 10273597 | Method of manufacturing CZ silicon wafers, and method of manufacturing a semiconductor device | Thomas Wuebben, Helmut Oefner, Hans-Joachim Schulze | 2019-04-30 |
| 9779931 | Method of manufacturing semiconductor wafers and method of manufacturing a semiconductor device | Helmut Oefner, Hans-Joachim Schulze | 2017-10-03 |
| 9536838 | Single crystal ingot, semiconductor wafer and method of manufacturing semiconductor wafers | Helmut Oefner, Hans-Joachim Schulze | 2017-01-03 |