Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7037844 | Method for manufacturing a housing for a chip having a micromechanical structure | Frank Dāche, Jochen Dangelmaier, Andreas Meckes, Michael Weber | 2006-05-02 |
| 6278167 | Semiconductor sensor with a base element and at least one deformation element | Thomas Bever, Stephan Schmitt | 2001-08-21 |