Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11652028 | Power semiconductor device and method for fabricating a power semiconductor device | Carsten Ehlers, Arthur Unrau | 2023-05-16 |
| 10600658 | Apparatus and method for bending a substrate | Guido Boenig, Niels Oeschler, Christian Stahlhut | 2020-03-24 |
| 10475668 | Apparatus and method for processing a semiconductor substrate | Guido Boenig, Niels Oeschler, Christian Stahlhut | 2019-11-12 |