Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6712926 | Recycling apparatus | Yuan-Yuan Chiang, Fu-Ching Tung, Janathan Wang | 2004-03-30 |
| 6390394 | Nozzle and adjust module | Fu-Ching Tung, Chia-Ming Chen, Jen-Rong Huang, Jonathan Wang | 2002-05-21 |
| 6220771 | Wafer backside protection apparatus | Fu-Ching Tung, Hong-Ming Chen, Wu-Lang Lin, Chia-Ming Chen, Jen-Rong Huang +1 more | 2001-04-24 |
| 5916631 | Method and apparatus for spin-coating chemicals | — | 1999-06-29 |
| 5908661 | Apparatus and method for spin coating substrates | William T. Batcheldor | 1999-06-01 |