Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6319568 | Formation of silicon nitride film for a phase shift mask at 193 nm | Chang-Ming Dai, Lon Wang | 2001-11-20 |
| 6045954 | Formation of silicon nitride film for a phase shift mask at 193 nm | Chang-Ming Dai, Lon Wang | 2000-04-04 |