Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269543 | Compensation of defective beamlets in a charged-particle multi-beam exposure tool | Rafael Reiter, Elmar Platzgummer | 2016-02-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269543 | Compensation of defective beamlets in a charged-particle multi-beam exposure tool | Rafael Reiter, Elmar Platzgummer | 2016-02-23 |