Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7435517 | Method for reducing the fogging effect | Dirk Beyer, Lemke Melchior | 2008-10-14 |
| 7241542 | Process for controlling the proximity effect correction | Dirk Beyer | 2007-07-10 |
| 7141808 | Device and method for maskless AFM microlithography | Ivo Rangelow, Tzwetan Ivanov, Olaf Fortagne | 2006-11-28 |
| 6136160 | Process for producing a carbon film on a substrate | Pavol Hrkut, Ivaylo W. Rangelow, Hans Loschner | 2000-10-24 |