Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7867565 | Method for coating substrates | Paul Mertens | 2011-01-11 |
| 7224433 | Method and apparatus for immersion lithography | Paul Mertens | 2007-05-29 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7867565 | Method for coating substrates | Paul Mertens | 2011-01-11 |
| 7224433 | Method and apparatus for immersion lithography | Paul Mertens | 2007-05-29 |