Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9000402 | LPP EUV light source and method for producing the same | Hajime Kuwabara | 2015-04-07 |
| 8907567 | Plasma light source and plasma light generation method | Hajime Kuwabara | 2014-12-09 |