Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9255899 | Non-destructive inspection method and device | Hiroyuki Nose, Tetsuya Kobayashi | 2016-02-09 |
| 9000402 | LPP EUV light source and method for producing the same | Kazuhiko Horioka | 2015-04-07 |
| 8907567 | Plasma light source and plasma light generation method | Kazuhiko Horioka | 2014-12-09 |
| 8680477 | Non-destructive inspection method and device | Hiroyuki Nose, Tetsuya Kobayashi | 2014-03-25 |
| 8648536 | Plasma light source | — | 2014-02-11 |
| 8535489 | Method for manufacturing ozone ice and apparatus for manufacturing ozone ice | Junichi Okuyama, Yasunori Hamano, Takahiro Matsuo, Yuka Yoshida, Nobuhiko Kubota +2 more | 2013-09-17 |
| 6900434 | Method and device for separating ion mass, and ion doping device | — | 2005-05-31 |