Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7153717 | Encapsulation of MEMS devices using pillar-supported caps | L. Richard Carley, Suresh Santhanam | 2006-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7153717 | Encapsulation of MEMS devices using pillar-supported caps | L. Richard Carley, Suresh Santhanam | 2006-12-26 |