Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7153717 | Encapsulation of MEMS devices using pillar-supported caps | L. Richard Carley, Hsu Yu-Nu | 2006-12-26 |
| 5970315 | Microelectromechanical structure and process of making same | L. Richard Carley, Michael Reed, Gary K. Fedder | 1999-10-19 |
| 5717631 | Microelectromechanical structure and process of making same | L. Richard Carley, Michael Reed, Gary K. Fedder | 1998-02-10 |