Issued Patents All Time
Showing 101–103 of 103 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835117 | Endpoint detection in chemical-mechanical polishing of patterned wafers having a low pattern density | Leping Li, Yingru Gu, Hung-Chin Guthrie | 2004-12-28 |
| 6741913 | Technique for noise reduction in a torque-based chemical-mechanical polishing endpoint detection system | Yingru Gu, Leping Li | 2004-05-25 |
| 6213846 | Real-time control of chemical-mechanical polishing processes using a shaft distortion measurement | Leping Li | 2001-04-10 |