Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4895447 | Phase-sensitive interferometric mask-wafer alignment | Gunter Makosch | 1990-01-23 |
| 4653922 | Interferometric thickness analyzer and measuring method | Gunter Makosch | 1987-03-31 |
| 4541720 | Apparatus for phase symmetrizing optical wave fronts | Gerd Hausler, Gunter Makosch | 1985-09-17 |