Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4895447 | Phase-sensitive interferometric mask-wafer alignment | Walter Jarisch | 1990-01-23 |
| 4764014 | Interferometric measuring methods for surfaces | Franz Schedewie | 1988-08-16 |
| 4714348 | Method and arrangement for optically determining surface profiles | — | 1987-12-22 |
| 4653922 | Interferometric thickness analyzer and measuring method | Walter Jarisch | 1987-03-31 |
| 4577968 | Method and arrangement for optical distance measurement | — | 1986-03-25 |
| 4541720 | Apparatus for phase symmetrizing optical wave fronts | Gerd Hausler, Walter Jarisch | 1985-09-17 |
| 4498771 | Method and means for interferometric surface topography | Franz Schedewie | 1985-02-12 |
| 4358201 | Interferometric measurement apparatus and method having increased measuring range | — | 1982-11-09 |
| 4275288 | Apparatus for machining material | Franz Schedewie, Arno Schmackpfeffer, Jorg Ziller | 1981-06-23 |