| 9214335 |
Surface plasma modification of porous thin-films to optimize pore filling |
Robert L. Bruce, Geraud J. Dubois, Krystelle Lionti, Teddie Peregrino Magbitang, Willi Volksen |
2015-12-15 |
| 9058983 |
In-situ hardmask generation |
Geraud Jean-Michel Dubois, Teddie Peregrino Magbitang, Willi Volksen |
2015-06-16 |
| 8940392 |
Titanium based inorganic-organic hybrid solid material, method for preparing same and uses thereof |
Christian Serre, Gérard Ferey, Clement Sanchez, Laurence Rozes, Meenakshi Dan |
2015-01-27 |
| 8927430 |
Overburden removal for pore fill integration approach |
Robert L. Bruce, Geraud Jean-Michel Dubois, Willi Volksen |
2015-01-06 |
| 8871632 |
Reduction of pore fill material dewetting |
Geraud Jean-Michel Dubois, Teddie Peregrino Magbitang, Willi Volksen |
2014-10-28 |
| 8828489 |
Homogeneous modification of porous films |
Geraud Jean-Michel Dubois, Willi Volksen |
2014-09-09 |
| 8623741 |
Homogeneous porous low dielectric constant materials |
Sampath Purushothaman, Geraud Jean-Michel Dubois, Teddie Peregrino Magbitang, Willi Volksen |
2014-01-07 |
| 8541301 |
Reduction of pore fill material dewetting |
Geraud Jean-Michel Dubois, Teddie Peregrino Magbitang, Willi Volksen |
2013-09-24 |
| 8492239 |
Homogeneous porous low dielectric constant materials |
Robert L. Bruce, Geraud Jean-Michel Dubois, Teddie Peregrino Magbitang, Sampath Purushothaman, David L. Rath +1 more |
2013-07-23 |
| 8314005 |
Homogeneous porous low dielectric constant materials |
Sampath Purushothaman, Geraud Jean-Michel Dubois, Teddie Peregrino Magbitang, Willi Volksen |
2012-11-20 |
