Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4637853 | Hollow cathode enhanced plasma for high rate reactive ion etching and deposition | Bruce Bumble, Jerome J. Cuomo, Joseph S. Logan | 1987-01-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4637853 | Hollow cathode enhanced plasma for high rate reactive ion etching and deposition | Bruce Bumble, Jerome J. Cuomo, Joseph S. Logan | 1987-01-20 |